200mm GaN-on-Si Batch Reactor
AIX G5+
5x200mm
AIX G5+ for GaN-on-Si
n Dedicated technology package
n Compatible with the AIX G5 HT platform
n Enables Si-style mass manufacturing
n Builds on planetary technology:
Excellent and symmetric uniformities,
controlled bow behavior,
using standard Si substrates.
AIXTRON SE · info@aixtron.com · www.aixtron.com
ISSN 1752-2935 (online)
semiconductorTODAY
COMPOUNDS & ADVANCED SILICON
Vol.7 · Issue 8 · October 2012 www.semiconductor-today.com
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